Nanocrystalline graphite films nucleation by the radio frequency bias pretreatment.
Research
RF Safe Research Library
Jan 1, 2011
This paper describes an engineering method for nucleating nanocrystalline carbon films on monocrystalline silicon using a combination of microwave and radio frequency plasma-assisted chemical vapor deposition. The approach is demonstrated via deposition of nanocrystalline diamond after a seeding step and growth of…