Effect of sputtering power on structural and optical properties of radio frequency-sputtered In2S3 thin films.
Research
RF Safe Research Library
Jan 1, 2014
This engineering/materials study examined how RF magnetron sputtering power affects the structural and optical properties of In2S3 thin films intended as a CdS buffer substitute in CIGS solar cells. Films deposited at 60–120 W were characterized using XRD, AFM, EDS, and UV-visible spectrophotometry. The films were…